Using a Free-Electron Laser as a Light Source for Extreme Ultraviolet Lithography

Equivalence between free-electron-laser oscillators and actively-mode-locked lasers: Detailed studies of temporal, spatiotemporal, and spectrotemporal dynamics
C. Bruni, T. Legrand, C. Szwaj, S. Bielawski, and M. E. Couprie
Phys. Rev. A 84, 063804 – Published 1 December 2011

ABSTRACT
We show experimentally and numerically that free-electron-laser (FEL) oscillators behave in a very similar way to conventional actively-mode-locked lasers. This stems from the similar structures of their underlying Haus equations. A comparative study of the temporal evolutions of the pulse train shapes and spatiotemporal regimes is performed on a Nd:YVO4 laser and a storage-ring free-electron laser. Furthermore, since direct observations of time-resolved pulse shapes and spectra are more accessible on free-electron lasers, the analogy also potentially enables one to investigate mode-locked laser dynamics using existing FEL facilities.

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