# Using a Free-Electron Laser as a Light Source for Extreme Ultraviolet Lithography

**URL:** <https://scanalyst.fourmilab.ch/t/using-a-free-electron-laser-as-a-light-source-for-extreme-ultraviolet-lithography/3807>\
**Category:** The Happening World\
**Tags:** extreme-ultraviolet, semiconductor-manufacturing, free-electron-laser\
**Created:** [29 September 2023 15:11 UTC](https://scanalyst.fourmilab.ch/t/using-a-free-electron-laser-as-a-light-source-for-extreme-ultraviolet-lithography/3807 "2023-09-29T15:11:40Z")\
**Posts on this page:** 1\
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**Author:** ![jabowery](https://scanalyst.fourmilab.ch/user_avatar/scanalyst.fourmilab.ch/jabowery/32/5478_2.png) [@jabowery](https://scanalyst.fourmilab.ch/u/jabowery)\
**Post date:** [1 October 2023 01:25 UTC](https://scanalyst.fourmilab.ch/t/using-a-free-electron-laser-as-a-light-source-for-extreme-ultraviolet-lithography/3807/2 "2023-10-01T01:25:55Z")

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[Equivalence between free-electron-laser oscillators and actively-mode-locked lasers: Detailed studies of temporal, spatiotemporal, and spectrotemporal dynamics](https://journals.aps.org/pra/abstract/10.1103/PhysRevA.84.063804)  
C. Bruni, T. Legrand, C. Szwaj, S. Bielawski, and M. E. Couprie  
Phys. Rev. A 84, 063804 – Published 1 December 2011

> ABSTRACT  
> We show experimentally and numerically that free-electron-laser (FEL) oscillators behave in a very similar way to conventional actively-mode-locked lasers. This stems from the similar structures of their underlying [Haus equations](https://scanalyst.fourmilab.ch/t/are-there-quantum-jumps-schrodingers-censored-chapter-in-what-is-life/3287/3). A comparative study of the temporal evolutions of the pulse train shapes and spatiotemporal regimes is performed on a Nd:YVO4 laser and a storage-ring free-electron laser. Furthermore, since direct observations of time-resolved pulse shapes and spectra are more accessible on free-electron lasers, the analogy also potentially enables one to investigate mode-locked laser dynamics using existing FEL facilities.

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